Energy Quenching Effects on Dry-Etching Durability of Alicyclic-Aliphatic Copolymers and Polymer Blends Enhanced by Polymer-Chain Entanglement
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概要
- 論文の詳細を見る
A correlation between the macromolecular structure and dry-etching durability is essential to design a resist of high performance. Ohnishi and ring parameters are known to be useful for estimating the durability, but some limitations are apparent, since the etching rate of a multicomponent matrix polymer is not only dependent on the composition. Previously, we have demonstrated that the etching rates of copolymers and polymer blends, which are composed of fragile aliphatic monomer and stable aromatic or alicyclic monomer units, are lower (the durabilities are higher) than the values calculated from those of the constituent homopolymers with the assumed wt% additivity. In this study, we prepared methyl methacrylate [MMA]/tricyclodecanyl methacrylate [TCDMA] copolymers of various compositions, and attempted to evaluate the dependence of etching rates on TCDMA content. The dependence was found to be inconsistent with those in the cases of $\alpha$-methyl-styrene, 2-vinyl-naphthalene, and isobornyl methacrylate copolymers and polymer blends reported in the previous papers.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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Saito Kyoichi
Department Of Applied Chemistry And Biotechnology Chiba University
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KAWAMOTO Kenryou
Department of Materials Technology, Faculty of Engineering, Chiba University
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Sugita Kazuyuki
Department Of Image Science And Engineering Chida University
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Kushida Masahito
Department Of Electrical Engineering Kanagawa University
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Sugita Kazuyuki
Department of Materials Technology, Faculty of Engineering, Chiba Univercity, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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Harada Kieko
Department of Materials Technology, Faculty of Engineering, Chiba Univercity, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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Kawamoto Kenryou
Department of Materials Technology, Faculty of Engineering, Chiba Univercity, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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Sugita Kazuyuki
Department of Graphic Engineering, Faculty of Engineering, Chiba University
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Harada Kieko
Department of Image Science and Engineering, Faculty of Engineering, Chiba University
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Harada Kieko
Department of Computer Science, Kitami Institute of Technology
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Saito Kyoichi
Department of Materials Technology, Faculty of Engineering, Chiba Univercity, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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