Thickness Dependence of Itching Rate in Dry Photoetching of Organic Resists
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-09-20
著者
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UENO Nobuo
Department of Materials Technology, Faculty of Engineering, Chiba University
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Ueno Nobuo
Department Of Applied Physics Tohoku University
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SUGITA Kazuyuki
Department of Materials Technology, Faculty of Engineering, Chiba University
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Sugita Kazuyuki
Department Of Image Science And Engineering Chida University
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