Fluorine-Doped Indium Oxide Thin Films Prepared by Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Transparent conductive fluorine-doped indiurn oxide thin films were prepared by an atmospheric-pressure chemical vapor deposition method without using an oxygen donor. The raw materials were indium 2-ethylhexanoate and indium fluoride. The polycrystalline films were obtained at a reaction temperature in the range of 330-430℃. For the 57.8-nm-thick film deposited at 400℃, the resistivity was 2.89×10^<-4> Ω・cm, and the transmittance was more than 85% in most of the visible range (470-700 nm). The effects of fluorine doping out the deposition rate, structure and characteristics of the film were discussed by comparing the results with the corresponding values for nondoped indium oxide film.
- 社団法人応用物理学会の論文
- 1990-09-20
著者
-
Fukui Kunihiro
Department Of Chemical Engineering Faculty Of Engineering Kyoto University
-
Fukui Kunihiro
Department Of Applied Physics Faculty Of Science Tokyo University Of Education
-
Maruyama Toshiro
Department Of Chemical Engineering Faculty Of Engineering Kyoto University
関連論文
- Effect of Inlet Duct Shape on Particle Separation Performance of Cyclone Separator
- Chemical-Kinetics Model for the Growth of a Multicellular Tumor Spheroid
- Silicorn Dioxide Thin Films Prepared from Silicon Tetraacetate Using ArF Excimer Laser by Chemical Vapor Deposition
- Electrical Characterization of Silicon Dioxide Thin Film Prepared by ArF Excimer Laser Chemical Vapor Deposition frorn Silicon Tetraacetate
- Enhancement of the Classification Performance of Electrical Field-Flow Fractionation Using Horizontal Electrophoresis
- Silicon Dioxide Thin Films Prepared Thermal Decomposition of Silicon Tetraacetate : Surfaces, Interfaces and Films
- NO_x Removal Using Ammonia Radicals Prepared by Intermittent Dielectric Barrier Discharge at Atmospheric Pressure
- Particle size measurement of standard reference particle candidates with improved size measurement devices
- Effects of initial slurry concentration distribution on the particle size distribution measured with a sedimentation balance method
- Indium-Tin Oxide Thin Films Prepared by Chemical Vapor Deposition from Metal Acetates
- Electrical Characterization of Silicon Dioxide Thin Films Prepared by Chemical Vapor Deposition from Tetrakis(diethylamino)silane and Ozone
- Synthesis of indium tin oxide powder by solid-phase reaction with microwave heating
- Continuous fine particle classification by water elutriator with applied electro-potential
- Utilization of NaCl for phillipsite synthesis from fly ash by hydrothermal treatment with microwave heating
- Classification of Particles Dispersed by Bead Milling Using Electrical Field-Flow Fractionation
- Effect of Multi-Inlet Flow on Particle Classification Performance of Hydro-Cyclones and New Estimating Equation
- Effects of microwave irradiation on the crystalline phase of zeolite synthesized from fly ash by hydrothermal treatment
- Effect of particle properties on the morphological change induced by impaction against a solid surface for tristearin powder mixed with hard particles
- Fluorine-Doped Indium Oxide Thin Films Prepared by Chemical Vapor Deposition
- Investigation about Data Reduction and Sedimentation Distance of Sedimentation Balance Method
- Phillipsite synthesis from fly ash prepared by hydrothermal treatment with microwave heating
- Influence of wall properties on the morphological change of Sb_2O_3 fine particles induced by impaction against a wall
- Particle size measurement with an improved sedimentation balance method and microscopic method together with computer simulation of necessary sample size
- Surface Modification of Poly (tetrafluoroethylene) Film Using Dielectric Barrier Discharge of Intermittent Pulse Voltage
- Separation of Unburned Carbon in Fly Ash Particles Using Special Louver Separator
- Classification of Particles Dispersed by Bead Milling Using Electrical Field-Flow Fractionation
- High-T_c Superconducting Bi-Pb-Sr-Ca-Cu-O Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts
- Photo-Assisted Metalorganic Chemical Vapor Deposition of Zinc Oxide Thin Films
- Fluorine-Doped Tin Dioxide Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts
- Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts : Electrical Properties of Condensed Matter
- Plasma Metalorganic Chemical Vapor Deposition of Indium Oxide Thin Films
- Silicon Dioxide Thin Films Prepared by Chemical Vapor Deposition from Silicon Tetraacetate
- Superconducting YBa_2Cu_3O_ Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts : Electrical Properties of Condensed Matter
- Enhancement of the Classification Performance of Electrical Field-Flow Fractionation Using Horizontal Electrophoresis
- Radial Modes of Plasma Waves
- Classification of particles by centrifugal separator and analysis of the fluid behavior
- ELECTRON MICROSCOPIC STUDIES ON THE ADRENAL MEDULLA AND ADRENAL CORTEX OF HYPERTENSIVE RATS : 2. EXPERIMENTAL HYPERTENSIVE RATS
- Magnesium Oxide Thin Films Prepared by Chemical Vapor Deposition from Magnesium 2-Ethylhexanoate
- Electron Microscopic Studies on the Adrenal Medulla and Adrenal Cortex of Hypertensive Rats : 1. Spontaneously Hypertensive Rats
- Cobalt Thin Films Prepared by Cherrnical Vapor Deposition from Cobalt Acetylacetonates
- Separation of Unburned Carbon in Fly Ash Particles Using Special Louver Separator
- Optimum Conditions for NO Reduction Using Intermittent Dielectric Barrier Discharge at Atmospheric Pressure
- CHROMOSOME STUDIES OF BONE MARROW CELLS FROM NORMAL AND ALLOXAN DIABETIC WISTAR RATS
- Copper Oxide Thin Films Prepared from Copper Dipivaloylmethanate and Oxygen by Chemical Vapor Deposition
- Alumina-anchored cobalt porphine catalysts for the conversion of quadricyclane to norbornadiene.
- Laboratory liquid-solid reactor in heterogeneous catalysis.
- Flow of settling slurries in horizontal pipes.
- Transition to turbulence in starting pipe flows.
- The flow structure of slurries in horizontal pipes.
- STRUCTURE OF THE TURBULENCE IN PULSATING PIPE FLOWS
- Theoretical calculation of uncertainty region based on the general size distribution in the preparation of standard reference particles for particle size measurement
- NOx Removal Using Ammonia Radicals Prepared by Intermittent Dielectric Barrier Discharge at Atmospheric Pressure