Indium-Tin Oxide Thin Films Prepared by Chemical Vapor Deposition from Metal Acetates
スポンサーリンク
概要
- 論文の詳細を見る
Transparent conductive indium-tin oxide thin films were prepared by a low-temperature atmospheric-pressure chemical vapor deposition method without using an oxygen donor. The raw materials were indium acetate and tin diacetate, which are inexpensive and easy to handle. A 260-nm-thick polycrystalline film was obtained after 1 hour of deposition at a reaction temperature of 300℃. The resistivity was 6.93×10^<13>Ω・cm, and the transmittance was more than 90% in most of the visible range (450-700 nm).
- 社団法人応用物理学会の論文
- 1990-02-20
著者
-
Tabata Kenji
Department Of Bioengineering Faculty Of Bioscience And Biotechnology Tokyo Institute Of Technology
-
Tabata Kenji
Department Of Chemical Engineering Faculty Of Engineering Kyoto University
-
MARUYAMA Toshiro
Department of Chemical Engineering, Faculty of Engineering, Kyoto University
-
Maruyama Toshiro
Department Of Chemical Engineering Faculty Of Engineering Kyoto University
-
Tabata Kenji
Department Of Applied Chmistry Faculty Of Engineering University Of Miyazaki
関連論文
- Chemical-Kinetics Model for the Growth of a Multicellular Tumor Spheroid
- Silicorn Dioxide Thin Films Prepared from Silicon Tetraacetate Using ArF Excimer Laser by Chemical Vapor Deposition
- Electrical Characterization of Silicon Dioxide Thin Film Prepared by ArF Excimer Laser Chemical Vapor Deposition frorn Silicon Tetraacetate
- Optimum Conditions for NO Reduction Using Intermittent Dielectric Barrier Discharge at Atmospheric Pressure
- Construction of a New Teichuronopeptide-defective Derivative from Alkaliphilic Bacillus sp. C-125 by Cell Fusion
- N-Terminus Methylation of Desulfovibrio vulgaris (Miyazaki) F Cytochrome c_3
- Protoporphyrin and Zinc Protoporphyrin in the Blood of Tumor Transplanted Mice
- Enhanced Enzymatic Saccharification of Alkaline Pretreated Ligneous Kudzu (Pueraria lobata) Stalks Using Silicon Powder under Visible Light Irradiation
- Silicon Dioxide Thin Films Prepared Thermal Decomposition of Silicon Tetraacetate : Surfaces, Interfaces and Films
- A Realistic SU(6) GUT with Dynamical Generation of Gauge Hierarchy : Particles and Fields
- A Natural Mechanism for Generating the Electroweak Scale by Non-Perturbative Effects : Particles and Fields
- NO_x Removal Using Ammonia Radicals Prepared by Intermittent Dielectric Barrier Discharge at Atmospheric Pressure
- A Natural Mechanism for Gauge Hierarchies by Non-Perturbative Effects : Particles and Fields
- Indium-Tin Oxide Thin Films Prepared by Chemical Vapor Deposition from Metal Acetates
- Electrical Characterization of Silicon Dioxide Thin Films Prepared by Chemical Vapor Deposition from Tetrakis(diethylamino)silane and Ozone
- Fluorine-Doped Indium Oxide Thin Films Prepared by Chemical Vapor Deposition
- Surface Modification of Poly (tetrafluoroethylene) Film Using Dielectric Barrier Discharge of Intermittent Pulse Voltage
- Enhanced Enzymatic Saccharification of Alkaline Pretreated Ligneous Kudzu (Pueraria lobata) Stalks Using Silicon Powder under Visible Light Irradiation
- High-T_c Superconducting Bi-Pb-Sr-Ca-Cu-O Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts
- Photo-Assisted Metalorganic Chemical Vapor Deposition of Zinc Oxide Thin Films
- Fluorine-Doped Tin Dioxide Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts
- Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts : Electrical Properties of Condensed Matter
- Plasma Metalorganic Chemical Vapor Deposition of Indium Oxide Thin Films
- Silicon Dioxide Thin Films Prepared by Chemical Vapor Deposition from Silicon Tetraacetate
- Superconducting YBa_2Cu_3O_ Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts : Electrical Properties of Condensed Matter
- ELECTRON MICROSCOPIC STUDIES ON THE ADRENAL MEDULLA AND ADRENAL CORTEX OF HYPERTENSIVE RATS : 2. EXPERIMENTAL HYPERTENSIVE RATS
- Magnesium Oxide Thin Films Prepared by Chemical Vapor Deposition from Magnesium 2-Ethylhexanoate
- Electron Microscopic Studies on the Adrenal Medulla and Adrenal Cortex of Hypertensive Rats : 1. Spontaneously Hypertensive Rats
- Cobalt Thin Films Prepared by Cherrnical Vapor Deposition from Cobalt Acetylacetonates
- EQCM法を利用したシトクロムcの電子プール機構に関わるヘムの特定
- Optimum Conditions for NO Reduction Using Intermittent Dielectric Barrier Discharge at Atmospheric Pressure
- CHROMOSOME STUDIES OF BONE MARROW CELLS FROM NORMAL AND ALLOXAN DIABETIC WISTAR RATS
- Copper Oxide Thin Films Prepared from Copper Dipivaloylmethanate and Oxygen by Chemical Vapor Deposition
- Alumina-anchored cobalt porphine catalysts for the conversion of quadricyclane to norbornadiene.
- Laboratory liquid-solid reactor in heterogeneous catalysis.
- Flow of settling slurries in horizontal pipes.
- Transition to turbulence in starting pipe flows.
- The flow structure of slurries in horizontal pipes.
- STRUCTURE OF THE TURBULENCE IN PULSATING PIPE FLOWS
- NOx Removal Using Ammonia Radicals Prepared by Intermittent Dielectric Barrier Discharge at Atmospheric Pressure