ZnO Thin Films Prepared by Ion-Assisted Deposition Method

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概要

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• Transparent conducting ZnO films were prepared by an ion-assisted deposition method. The glass substrate was irradiated with Ar ions during deposition of amorphous films and the c-axis-oriented ZnO film with the lowest resistivity is obtained when the growing film is irradiated with Ar plasma. Optical emission lines due to Ar, Zn_2, Zn and O of neutral species were detected. In particular, the ratio of emission line intensity O(777 nm)/Zn(635 nm) is closely related with film properties. The control of plasma conditions by the check of the emission line intensity provides a method of obtaining a high-quality transparent conducting ZnO film.

• 社団法人応用物理学会の論文
• 1991-08-15

著者

• Miyamoto Kazuhiro

  Tsukuba Research Laboratory Stanley Electric Co. Ltd.:institute Of Applied Physics University Of Tsu

• Arai Toshihiro

  Institute For Optical Research Kyoiku University

• Onari Seinosuke

  Institute For Optical Research Tokyo University Of Education

• Onari Seinosuke

  Ins-sor Group Institute For Nuclear Study University Of Tokyo:college Of Education University Of Tok

• Seinosuke Onari

  Institute Of Applied Physics University Of Tsukuba

• Onari Seinosuke

  Institute Of Applied Physics Universtiy Of Tsukuba

• Onari Seinosuke

  Institute Of Applied Physics University Of Tsukauba

• Onari Seinosuke

  Department Of Pure Applied Sciences College Of General Education University Of Tokyo

• Onari Seinosuke

  Department Of Pure And Applied Science College Of General Education. University Of Tokyo

• YOSHIDA Makoto

  Tsukuba Research Laboratory, Stanley Electric CO., LTD.

• TOYOTAMA Hideki

  Tsukuba Research Laboratory, Stanley Electric CO., LTD.

• Toyotama Hideki

  Tsukuba Research Laboratory Stanley Electric Co. Lid.

• Toyotama Hideki

  Tsukuba Research Laboratory Stanley Electric Co. Ltd.

• Onari Seinosuke

  Department Of Pure And Applied Sciences College Of General Educaiton University Of Tokyo

• Yoshida Makoto

  Tsukuba Research Laboratory Stanley Electric Co. Ltd.

• Arai Toshihiro

  Institte For Optical Research Kyoiku University

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