3515 紫外線硬化樹脂を用いた切断ブレードの開発

概要

論文の詳細を見る
For the production of dicing blades using thermal selling resin binder, several hours for curing process in which thermal deformation induced by thermal shrinkage results in accuracy deterioration are usually required and the lapping process for modifying the blades has been the neck in cost reduction. Dicing blade with UV-resin binder has been developed to solve this problem. On the other hand, higher accuracy and efficiency are required in the dicing process of various hard-and-brittle materials. Thus the opposite demands, increasing the dicing efficiency and reducing the occurrence of chipping, are to be met simultaneously. Based on the feature of UV-resin that is easily to produce a multi-layer structure, we have developed a new type of dicing blade which has a three-layered structure consisting of a inner layer including coarse abrasive grains, and two outer layers of fine abrasive grains. In comparison with the traditional dicing blades, the new type of blade has shown higher dicing efficiency and better cutting quality.
一般社団法人日本機械学会の論文
2000-07-31