小型2次元光走査機構の開発 : 第2報, 低電圧駆動, 大走査角化を目的とする2自由度板ばね振動子の高性能化

概要

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We describe the improvement of a miniature two-dimensional optical scanner for wide-area optical scanning and low-voltage driving. First, the bending and torsional fracture stresses of a fine leaf spring made of single-crystal silicon were experimentally determined. They were 1 GPa for bending fracture and 0.3 GPa for torsional fracture, and a fatigue fracture tendency was also observed. Based on the determined fracture stresses, an improved two-dimensional fine leaf spring resonator, wherein the wing part of the previous resonator was removed to reduce air resistance, was developed. Also, an additional mass was put on the mirror to create torsioal and bending moments. Secondly, the shape of a moonie actuator, which magnifies the transverse strain of a piezoactuator more than 10 times, was optimized by FEM analysis to produce a large displacement with a low-voltage drive. Consequently, a miniature two-dimensional optical scanner 5mm×10mm×2.2mm in size was developed, which can scan from forty degrees to eighty degrees with a 15-volt drive.
社団法人日本機械学会の論文
1996-08-25