超精密位置決めにおける3種類の送りねじの特性比較

概要

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The characteristic comparison of three kinds of leadscrews (a precision sliding screw, a precision ball screw and a rolled ball screw) is described on the one-dimensional ultraprecision positioning apparatus with a position feedback system in the PTP method. The followings are clarified ; (1) Since the damping factor of the ball screw is ten times smaller than that of the sliding screw, the table response using the ball screw is sharper and shows a larger vibration, (2) when three kinds of leadscrews have the same friction torque at low speed, the relationship between the variation of the friction torque and the positioning error is clarified from the quantified point of view by a step response using the proportional control. (3) The relationship between the electric current of the DC servomotor and the table displacement in the step response under sub-micronmeter stroke is of stick-slipping characteristic for the sliding screw and of elastic characteristic for the ball screw.
一般社団法人日本機械学会の論文
1991-10-25