1nm分解能の小型変位センサと小型超精密位置決め装置の開発

概要

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The ultraprecision positioning device for nanotechnology has to be small because it is mainly used on several kinds of microscopes. In this study, firstly, a very small displacement sensor with 1 nm resolution is developed to use as a feedback sensor. The sensor that applies an optical diffraction has the advantage of small size and large gap tolerance between the moved gratings and fixed index gratings. Secondly, by use of the above-mentioned sensor, a small ultraprecision positioning device is developed with 1 nm positioning resolution. Its small stage of 60 mm length and 60 mm width is moved by a stepping motor and ball screw for a coarse positioning and then is moved by a PZT for a fine positioning. As a result of repeated step responses, the deviational error of 0.04 nm and the dispersion error of 0.49 nm can be obtained.
2003-10-05