ねじ駆動による超精密位置決め(第3報) : ナノメータ精度位置決めと整定時間の短縮

概要

論文の詳細を見る
In the 1st and 2nd reports, a nanometer level positioning accuracy could be obtained on the one-dimensional table unit driven by a lead screw (a sliding screw or a ball screw) with position feedback system. To carry the table (15.7 kg) into the ±10 nm range from the target position, it took a long settling time of one second due to the residual vibration caused by the rapid acceleration of the table. In this report, the effect of the three positioning steps is presented to obtain the nanometer level position accuracy and to reduce the settling time. These three steps are ; (1) Coarse positioning by an Anti Residual Vibration (ARV) system to eliminate the residual vibration, (2) A semi-fine positioning by a Pulse Width Control (PWC) and (3) Fine positioning at the small table-moving range where the nonlinear elastic characteristic of rolling elements appears in the ball screw and table ball guide ways. As a result, the nm positioning accuracy and the shorter settling time of 300-400 ms can be obtained at the same time.
公益社団法人精密工学会の論文
1993-10-05