ボールねじの微視的変位挙動に関する研究(第1報) : 準静的特性に関する基礎実験

概要

論文の詳細を見る
Positioning tables using preloaded ball screws show nonlinearly elastic characteristics between small torque input and table displacement within microscopic range of several micrometers. The elastic property is available in nanometer positioning control because the displacement reveals no sticking and responds to the toque input, even small. However, it has not been known how the elastic property is influenced by conditions of the preload or input torque. This study aims at clarifying the elastic property of preloaded ball screw in microscopic range under various conditions, in order to apply the property to ultra-precise positioning with nanometric resolution. This report presents some experimental results on the elastic property of ball screws which are preloaded by deferent methods.
公益社団法人精密工学会の論文
2000-07-05