水平多関節型位置決め機構の精度特性に関する研究(第1報) : 水平面内の広・狭領域におけるPTP位置決め精度測定システムの構成

概要

論文の詳細を見る
This study deals with positioning accuracy of SCARA-type manipulator from viewpoints of precision positioning technology. A SCARA-type manipulator is considered as a Planar Multi-joint Positioning System. Nowadays, they are used widely in production lines, so that it is expected to use the manipulator not only for assembly but also for coordinate measurement in the lines. The requirements for positioning accuracy with the manipulators become more demanding. However, existing manipulators have a positioning error of over 0.1 mm, its accuracy is much inferior to Cartesian-type positioning mechanism. The accuracy has not been easy to improve because a standard measuring method for the positioning accuracy of multi-joint manipulators has not been established. This report discusses a method of accuracy measurement using CCD camera and reference board on a XY stage. A measurement system for PTP positioning accuracy with resolution of 1.2 μm over the area of 400 × 200 mm is constructed, and some measurement results of PTP positioning accuracy are shown in local to global range on a horizontal plane.
公益社団法人精密工学会の論文
2003-02-05