弾性変形要素を付加したすべり送りねじによる超精密位置決め(第1報) : 摩擦特性と弾性変形機構

概要

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The sliding leadscrew is a machine element used most generally in positioning technology. However, because of excessively discontinuous characteristic of friction between a male screw and a female one, it becomes an improper element for ultra-precision positioning. This study aims at improving such negative situation by a new technique. In the technique, axial displacement caused by deformation of an elastic element attached in series to a sliding lead screw is utilized for minute positioning motion under a full-closed displacement control. The deformation generated is adjusted by friction torque within maximum static friction. As the first report, this paper deals with friction characteristic in a sliding lead screw which must be basically known for this technique, and the structure and design of the elastic element. From experiments simulated to the case, it is confirmed that usable state of static friction exists clearly in use of lubricants f'or positioning. Experiments about function of the elastic elements equipped in a positioning apparatus show good results nearly as expected and possibility of ultra-precision positioning at nano-meter level.
社団法人精密工学会の論文
2000-08-05