ねじ駆動による超精密位置決め(第1報) : すべりねじとボールねじによる基礎的研究

概要

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One dimensional table unit driven by a sliding screw or a ball screw is made with a laser feed-back system, aiming at ultra-precision positioning at high speed. In this report, the following items are clarified by the experiment of PTP proportional control : (1) With increasing the axial speed, the sliding screw requires much more energy than the ball screw and this derives a damping effect to the control system. Therefore, the ball screw shows a sharper response than the sliding screw. (2) In case of the simple proportional control, the deviation error (off-set error) is generated by the quantumization of a D/A converter. By adjusting the proportional gain, both the deviation error and the dispersion error cannot be decreased at the same time.
公益社団法人精密工学会の論文
1990-11-05