摩擦駆動による精密位置決めの研究(第3報) : インプロセスで速度を設定する制御

概要

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The friction drive has merits that it is able to move the table very unnoisily and fast and that it has a simple structure. In the last report a short settling time could be obtained, but this method was not practical because it was necessary to know the traction characteristics, the moved mass and the frictional resistance of the guide way. In this report, the followings are described; (1) The DC servomotor and the linear measuring device used in the last report were replaced by the DD motor and the laser measuring system to get higher positioning accuracy. (2) The PTP velocity control for the table movement during the process was newly developed when the traction characteristics and the others were unknown. (3) This velocity control and the mechanical improvement carried the submicron positioning accuracy and the same settling time as the result of the last report. (4) The simulation using the kinematic equation clarified the mechanical system movement.
社団法人精密工学会の論文
1991-02-05