流体駆動マイクロアクチュエータの開発

概要

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The present paper describes a new design of a fluid driven microactuator which comprises a planar piston, a four-way control valve, and a mechanical feedback system that controls the output in accordance with an input displacement. Fabrication processes of the microactuator include bulk micromachining of two sheets of silicon substrate and their assembly by electrostatic bonding to glass plates. The output characteristics were measured supplying the compressed air. Generated output force was partially linear to supplied pressure and to valve displacement. However, the magnitude was asymmetric in terms of driven directions, which results from geometrical configuration essentially introduced by an anisotropic etching of the silicon. The position of the output shaft was sufficiently controlled with a designed magnification factor multiplied to the input displacement in both static and dynamic senses.
社団法人日本機械学会の論文
1994-11-25