マイクロマシニングによる超音波顕微鏡用シリコン音響レンズの開発 : 第3報,直線集束ビーム超音波顕微鏡用シリンドリカルレンズの開発

概要

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A cylindrical lens for quantitative measurement of acoustic properties including anisotropy on various solid surfaces, has been fabricated by micromachining. A silicon single crystal was used as the material for the acoustic lens. The etching conditions suitable for obtaining excellent circularity, less than 0.5 μm, demanded for use in the 400 MHz range, have been investigated. When the ratio of length along the longitudinal axis to length along the transverse axis is more than 10, circularity of the etched cylindrical lens showed a maximum deviation of 0.3 μm from a perfect circle. A silicon line-focus beam lens designed for use in the 400 MHz range has been successfully achieved using the V(z) curve measured for fused quartz.
社団法人日本機械学会の論文
1994-06-25