マイクロマシニングによる超音波顕微鏡用シリコン音響レンズの開発 : 第2報,室温観察用 1 GHz レンズの開発

概要

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In an effort to develop a scanning acoustic microscope (SAM) providing high resolution at room temperature, an acoustic lens with 55 μm radius for use in the 1 GHz frequency range was fabricated by micromachining. Single-crystal silicon was used as the material for the acoustic lens. Suitable etching conditions for obtaining excellent sphericity and the required radius were investigated. When the mask hole diameter is less than 80 μm, there are optimum etching times for obtaining good sphericity. The concave etched profile for a 1 GHz range lens showed a maximum deviation of less than 0.2 μm from a perfect sphere. A silicon acoustic lens designed for use in the 1 GHz frequency range has been achieved with a resolution of 1.1 μm expected at the given wave-length.
社団法人日本機械学会の論文
1994-06-25