マイクロマシニングによる超音波顕微鏡用シリコン音響レンズの開発 : 第1報,フィゾー形干渉計による球面精度の評価

概要

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In an effort to develop a new acoustic lens for the scanning acoustic microscope (SAM), the spherical accuracy of a lens with 200μm in radius for a high frequency range was studied. A Fizeau-type laser interferometer was employed to measure the profile of etched cavities. Spherical accuracy was evaluated by counting interference fringe patterns appearing as a result of optical path differences between the reference and sample surfaces. Focusing area of the acoustic lens was estimated by means of geometrical optics based on measured and assumed accuracy. The spherical accuracy required to ensure good focusing of the acoustic wave to a spot size on the order of one wave length was calculated using the result of interference fringes. Sufficient spherical accuracy for a silicon acoustic lens at 400MHz was calculated to be -0.13times of one wave length.
社団法人日本機械学会の論文
1994-01-25