高温高湿環境下におけるゾル・ゲルSiO_2薄膜の物理的性質及び構造の変化

概要

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The effects of addition of poly (ethylene glycol) (PEG) , to gel films on the optical properties and structure of the resultant SiO_2 coating films have been studied be fore and after being subjected to an environment of high temperature and high humidity. The larger amount and the larger molecular weight of PEG produced the larger volume of pores in the resultant SiO_2 films on the decomposition of PEG during the heat treatment. The refractive index of such porous films was found to increase due to water adsorbed in the films. On the other hand, the porosity and the amount of adsorbed water of the films decreased after the treatment in an environment of high temperature and high humidity. The decreases in porosity and the amount of adsorbed water were more significant in the films prepared with the addition of the larger amount of PEG with a larger molecular weight. These findings can be ascribed to the decrease in silanol groups and densification of the fihns with the treatment at high temperature and high humidity, as confirmed by the changes in IR absorption spectra and the results of TEM observation.
社団法人日本セラミックス協会の論文
1994-04-01