Photolysis of Organically Modified Gel Films and its Application to the Fine-patterning of Oxide Thin Films
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概要
著者
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峠 登
近畿大学理工学部金属工学科
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峠 登
近畿大学
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Minami T
Department Of Applied Materials Science Graduate School Of Engineering Osaka Prefecture University
関連論文
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- Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O_2/He, and TEOS/O_3/He Systems
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- 2G04 光感応性 ZrO_2 ゲル膜の化学修飾剤による特性制御
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- Fabrication and Characterization of Diffraction Gratings Using Photosensitive Al_2O_3 Gel Films
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- 光感応性Al_2O_3ゲル膜の作製と微細パターニングへの応用
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- Photolysis of Organically Modified Gel Films and its Application to the Fine-patterning of Oxide Thin Films
- Fine-Patterning of ZrO_2 Thin Films by the Photolysis of Chemically Modified Gel Films
- Highly Conducting and Transparent SnO_2 Thin Films Prepared by RF Magnetron Sputtering on Low-Temperature Substrates : Surfaces, Interfaces and Films
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- Direct Preparation of Fine Powders of the 80 K Superconducting Phase in the Bi-Ca-Sr-Cu-O System by Spray Pyrolysis
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- Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
- Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
- All Solid-state Lithium Secondary Batteries Using High Lithium Ion Conducting Li_2S-P_2S_5 Glass-Ceramics
- High Lithium Ion Conductivity of Glass-Ceramics Derived from Mechanically Milled Glassy Powders
- Electroluminescent Devices with Ga_2O_3 : Mn Thin-Film Emitting Layer Prepared by Sol-Gel Process
- Effects of Sb or Sn Addition on Precipitation of the High-T_c Superconducting Phase from Rapidly Quenched Bi-Pb-Ca-Sr-Cu-O Glasses
- Crystalline Phases Precipitated by Heat-Treatment of Rapidly-Quenched Glasses in the Bi-Ca-Sr-Cu-O System
- Substitution Effects of Pb for Bi on the Formation of High-T_c Superconducting Thick Films in the Bi-Pb-Ca-Sr-Cu-O System by the Melt-Solidification Method
- Instantaneous Preparation of Superconducting Thick Films through Melts in the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- Glass Formation of High-T_c. Compound BiCaSrCu_2O_x by Rapid Quenching : Electrical Properties of Condensed Matter
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- ゾル-ゲル薄膜の光微細加工 (ガラスの光微細加工)
- 光感応性ゲル膜の微細パタ-ニングへの応用
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- 光学及びイオン伝導材料としてのカルコゲナイドガラス (カルコゲン化合物)
- ゾル-ゲル法による非線形光学ガラスの作製 (1991年の化学-6-)
- 酸化物高温超伝導体の合成プロセス--ガラス化法,噴霧熱分解法
- ゾルゲル法のよる安定化アルミニウムアルコキシドからの非晶質Al_2O_3薄膜の作製(ガラス・アモルファス材料及びその材料科学の進展)
- 酸化物高温超伝導体のガラス化とその特性 (1989年の化学-5-)
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- ガラス基板の微細加工--ゾル-ゲル法の応用 (ニュ-ガラスとOptics)
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