テトラエトキシシランとメチルトリエトキシシランの混合ゾルから作製したシリカ系薄膜の表面粗さに及ぼす添加物の影響

概要

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We have examined the influence of additives to coating sols, such as water, aldehyde, acetal, ester, carboxylic acid and several kinds of diols on the surface roughness of coating films with a "concave-convex" surface, derived from the mixtures of tetraethoxysilane (TEOS) and methyltriethoxysilane (MTES). Among the additives tested, n-butyric acid and diols such as ethylene glycol, propanediol, butanediol or pentanediol increased the surface roughness of the resultant films. It was also found that the surface roughness (R_a) was controlled by changing the concentration of the additives and that the diols showed different effects among the isomers. Among normal butanediols, 1,4-butanediol of methylene-type diol was the most effective to increase R_a of the films, followed by 1,3-butanediol and then by 1,2-butanediol.
社団法人日本セラミックス協会の論文
2003-09-01