ゾル-ゲル法によるアモルファスリン酸チタニウム薄膜の合成と電気的特性

概要

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Influence of humidity on the electrical conductivity on sol-gel derived amorphous titanium phosphate oxide films of nominal compositions of 1TiO_2・9P_2O_5 to 9TiO_2・1P_2O_5(molar ratio)was investigated. The surface resistivity of a 3TiO_2・7P_2O_5 film showed two order dependence on relative humidity change from 50 RH% to 90 RH% at 30°C. The surface conductivity of this film was 10^<-3> S・cm^<-1> at 30°C, 90 RH%. It is higher than that of alkaline-earth phosphate glasses(10^<-5> S・cm^<-1> at around 100°C). Furthermore, the electrical resistance of this film decreased about one order after keeping it in a high humidity atmosphere of 90 RH% at 30°C for 2.5h. This phenomenon implies that the proton conductivity was much enhanced by a large amount of molecular water(recognized at 3250 cm^<-1> in FT-IR spectrum)which incorporated into the glass structure.
社団法人日本セラミックス協会の論文
1997-07-01