チタン酸ジルコン酸鉛セラミックス結晶相のX線光電子分光分析

概要

論文の詳細を見る
Lead zirconate titanate ceramics(PZT), PbZr_xTi_<1-x>O_3(0.12≤x≤0.87), were analyzed by X-ray photoelectron spectroscopy(XPS). No difference between the rhombohedral(0.53<x≤0.87)and the tetragonal(0.12≤x<0.53)phases was detected for both the Pb4f and Ti2p XPS spectra, however, a significant difference was found for Zr3d. The Zr3d spectrum for the rhombohedral phase was deconvoluted to a pair of Zr3d_<3/2> and Zr3d_<5/2> at the binding energies of 181.3±0.2eV(profile A1)and 183.6±0.2eV(A2), respectively. In contrast, that for the tetragonal phase was deconvoluted to a pair of binding energies of 182.1±0.2eV(B1)and 184.5±0.2eV(B2)in addition to almost the same pair as the rhombohedral phase, suggesting the existence of two different chemical states. Such deconvolution, resulting in two pairs, was also observed in the case with the morphotropic phase boundary(MPB, x=0.53), however, the area ratio(B1+B2)/(A1+A2)of the MPB was quite different from the ratio of the tetragonal phase. As a result, it was demonstrated that the XPS analysis on Zr3d led to the identification of the crystalline phase of PZT.
社団法人日本セラミックス協会の論文
1999-09-01