X線光電子分光法のPZT組成定量分析への応用

概要

論文の詳細を見る
X-ray photoelectron spectroscopy (XPS) was applied to determine relative quantities of lead (Pb) , zirconium (Zr), and titanium (Ti) in lead zirconate titanate (PZT) systems. Standard samples were PZT's with several Zr/Ti ratios prepared by solid state reaction from metal oxide mixtures, and analyzed peaks in the XPS spectra were Pb_<4f7/2>, Zr_<3d5/2>, and Ti_<2p3/2> corresponding to Pb, Zr, and Ti, respectively. The ratio of their relative detectability was calculated from their peak intensities, that is, Pb_<4f7/2> : Zr_<3d5/2> : Ti_<2p3/2>=4.30 : 1.50 : 1.00. This value was considerably different from that theoretically induced based on the reported parameters such as the cross section of photoionization, the mean free path of electron, and the instrumental detection efficiency. Empirical formulae expressing the relationships between relative quantities of elements and relative intensities of corresponding peaks were obtained based on the above results. The reliability for analyzed compositions by means of these formulae was within ±2% for a single analysis, however, it was within ±1% when the number of analyses was 3 to 5.
社団法人日本セラミックス協会の論文
1993-03-01