スプレー熱分解法によるNiZnフェライト薄膜の作製とその特性

概要

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Nickel-zinc (NiZn) ferrite thin films were successfully prepared from nickel, zinc, and iron nitrates aqueous solutions at a substrate temperature between 350 and SOOt in air by a spray pyrolysis deposition method (SPD), where the film thickness was held at about 1μm and the deposition rate was varied between 100 and 200 nm/min depending on the substrate temperature. The crystallinity of as-prepared NiZn ferrite films became higher with increasing substrate temperature, but it could not reach a suitable value to produce mag netic properties suitable for practical applications. It was then necessary to anneal the films at higher tem peratures above 600℃. Magnetic properties comparable with those of bulk NiZn ferrite and applicable to practical magnetic devices were obtained by annealing at 750℃. Furthermore, we attempted the preparation of well-crystallized NiZn ferrite thin films by adding hydrogen peroxide to the starting solutions.
社団法人日本セラミックス協会の論文
2002-10-01