面絞り方式空気静圧案内面の設計と試作

概要

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It is known that the stronger restricting effect can bring the higher stiffness for the applied aerostatic bearings. So called "the surface restriction" is preferred instead of such conventional ones as an annular orifice from the above point of view. The analyzing method for the surface restricted aerostatic slideway, adopted Finite Element Method for instance, may result in an exact solution, but be rather complicated, hence not suited to be applied for the practical design stage. The present paper stresses the easiness of calculation for bearing performances, and has developed the simplified analysis, where the continuous air flow is replaced by a lumped constant model. That is, the bearing surface is meshed into nodes, and the pressure at a certain node is equated by the surrounding four nodes. Linking each node and taking balance as to the whole bearing surface, the simultaneous equations with the unknowns of number of nodes can give the pressure distribution, bearing capacity and stiffness. Some experiments, made for the different sizes of "T"- shape surface restrictor, could considerably well coincide with the analysis, and could show that the present analysis was quite practical to design the required specifications.
公益社団法人精密工学会の論文
1988-04-05