超精密加工液の濾過機械の開発に関する研究

概要

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The elastic grinding wheels with a resistant wear properties are used for mirror abrasive processing of metal molds. And also, the passage efficiency of machining fluids are very high. Keeping our eye on these points, we experimented with use of a binder (PVA + Phenol resin) of elastic grinding wheel for the filter material of the machining fluid for ultra-precision processing. Our experiment produced the following conclusions. (1) PVA and phenol resin functioned sufficiently as filter material for filtration can be achieved at a lower filtration cost compared with the conventional filter material of the cartridge-filter type. (2) We were able to manufacture the filter material whose mean pore diameter was 0.05-200 μm, with a porosity of 65-94%, filter drag of 0.5-80 mm/Aq and a resistant compressive strength of 50 kgf/cm^2. (3) The filtration machine has a machining fluid concentration of 0.5 ppm, filtering efficiency of 99.99%, mean particle diameter of the impurity materials of 0.1 μm and a filtrating rate of 5 l/min. (4) Filtration can be performed with both water-soluble type and straight-oil type, but there is a difference in the filtrating rate. (5) The processing accuracies and performance of ultra-precision processing by filtration are not improved to any great extent, but life of machining fluid is increased greatly and stable processing accuracy and performance are able to be obtained.
公益社団法人精密工学会の論文
1987-07-05