薄膜酸化法によるCo-フェライト薄膜の微視的構造と磁気特性

概要

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This paper presents the relative correlation between microscopic structures and perpendicular magnetic properties of Co-ferrite films. Co-ferrite films are prepared by the oxidation process in the heat treatment of evaporated Fe-Co multi-layer thin films. An oxidation temperature region is less than 550℃. An oxidation atmosphere of 760 Torr O_2 have magnetic field of 1 kG in the perpendicular direction to the film surface. The experimental results obtaind by the detailed technique that the analysis of component, composition and microscopic structure of oxide films measured with AES, XPS, SEM, X-ray diffraction and VSM. One cause of the perpendicular magnetic properties of their oxide films is thought to be the effect of the column grain growth of oxide particles which facilitated by growing vertically grain boundaries.
東海大学の論文
1992-03-30