対向ターゲット型スパッタシステムを用いたGeSbTe薄膜に関する研究(第1報) : 装置の提案ならびに構成と基本特性

概要

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We propose a new method as the most useful means to produce the multilayered optical floppy disk with high density. In this method, the same targets are oppositely arranged with proper separations. We have named this method FTS which stands for Facing Targets Sputtering, the mechanism for forming plasma. It is possible to obtain the GeSbTe thin films of phase change media without exposure to high energy plasma by applying the FTS system. A magnetic field exists in the region of the holding plasma because of the perpendicular arrangement to the target surface. This effect enables the deposit of the films on the glass substrate at a high rate. The erosion pattern formed on the plasma is flatter and thus more efficient than erosion patterns formed by other methods. Using this newly method, FTS, it is possible to obtain the multilayered optical floppy disks with no change in the chemical composition between the target and the film.
東海大学の論文
1999-03-30