近接場光ディスクヘッドの高効率化設計と実験

概要

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Higher throughput efficiency has been obtained in the near-field semiconductor optical probe array head. However, the obtained evanescent light power is about 10μW from a 100nm probe aperture and 1mW VCSEL power, which is still not enough to write a bit on the phase change optical disk. One solution to improve the optical power more than ten times is to develop a special nano-fabricated optical probe array of higher throughput efficiency. A metal fine grating fabrication method to get evanescent light wave resonant enhancement has been studied along with a 2D-FDTD simulation technique. It is very important key technology to realize 10nm width grooves on semiconductor material using nano fabrication technology and fill the nano grooves with nano gold particles in order to develop a very high efficiency experimental near-field optical disk head.
東海大学の論文
2004-03-30