小型高性能力覚センサを用いたロールツーロールスパッタ装置用張力計測システムの試作

概要

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Highly efficient micro-sized force sensor by using chromium silicon carbide (Cr-Si-C) composite thin film has been developed. The characteristic of the tension measurement system by using this force sensor for tension control as “Sensor roll”, for roll-to-roll sputtering system is also described. Sensor roll can speed up the response to tension changes for 0.5 seconds than that of electromagnetic transformer type tension sensor. Sensor roll has been installed in roll-to-roll sputtering system and the behavior of the film has been observed, Sensor roll has enabled measuring in real time transient changes in tension. The tension measurement system with high-efficiency and high-stability has been prepared in a vacuum environment by using the highly efficient micro-sized force sensor.
2011-03-20