Monte Carlo Simulation Study of Backscattered Electron Imaging in a Chemical Vapor Deposition Scanning Electron Microscope
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2001-05-01
著者
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高井 義造
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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KIMURA Yoshihide
Department of Applied Physics, Osaka University
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YOSHIDA Takeshi
Department of Gastroenterology, Hokkaido University Graduate School of Medicine
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TAKAI Yoshizo
Department of Material and Life Sciences, Graduate School of Engineering, Osaka University
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NAGATOMI Takaharu
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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NISHIKATA Kentaro
Department of Material and Life Science, Graduate School of Engineering, Osaka University
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木村 吉秀
大阪大 大学院工学研究科
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