Ogura Atsushi | Meiji Univ. Kawasaki Jpn

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著作論文

Composition Control of Ni Silicide by Chemical Vapor Deposition Using Ni(PF3)4 and Si3H8
Composition control of Ni-silicide by CVD using Ni(PF_3)_4 and Si_3H_8
Ni Thin Film Deposition from Tetrakistrifluorophosphine-Nickel
Depth Profiling of Si/Si_Ge_x Structures by Micro-Raman Imaging
Microscopic Distributions of Light Elements and Their Precipitates in Multicrystalline Silicon for Solar Cells
Impact of Light-Element Impurities on Crystalline Defect Generation in Silicon Wafer (Special Issue : Solid State Devices and Materials (1))
Complementary Distribution of NN and NNO Complexes in Cast-Grown Multicrystalline Silicon for Photovoltaic Cells
Interaction between Metal Impurities and Small-Angle Grain Boundaries on Recombination Properties in Multicrystalline Silicon for Solar Cells
Analysis of Intra-Grain Defects in Multicrystalline Silicon Wafers by Photoluminescence Mapping and Spectroscopy
Orientation Dependence of Silicon Oxidation Ratio in High-Pressure Water Vapor
Improvement in Characteristics of Thin Film Transistors upon High-Pressure Steam Annealing
Ion Shower Doping Technique for Selective Emitter Structure in Crystalline Silicon Solar Cells
Formation of Si
Formation of Si₂N₂O Microcrystalline Precipitates near the Quartz Crucible Wall Coated with Silicon Nitride in Cast-Grown Silicon
Ni Thin Film Deposition from Tetrakistrifluorophosphine-Nickel
Ion Shower Doping Technique for Selective Emitter Structure in Crystalline Silicon Solar Cells (Special Issue : Solid State Devices and Materials)

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