Higashi S | Seiko Epson Corporation Technology Platform Research Center
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概要
関連著者
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Higashi S
Seiko Epson Corporation Technology Platform Research Center
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HIGASHI Seiichiro
Seiko Epson Corporation, Technology Platform Research Center
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Higashi Seiichiro
Seiko Epson Corporation
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井上 聡
セイコーエプソン株式会社フロンティアデバイス研究所
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Kawai Yoshinobu
Welding Research Institute Osaka University
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Abe Daisuke
Frontier Device Research Center Seiko Epson Corporation
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Shimoda Tatsuya
Seiko Epson Corp. Nagano Jpn
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KAWAI Yoshinobu
Department of High Energy Engineering Science,Interdisciplinary Graduate School of Engineering Scien
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HIGASHI Seiichiro
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Science
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Inoue S
Seiko Epson Corporation
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河合 良信
Kyushu Univ. Fukuoka
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Kawai Yoshinobu
Department Of Advanced Energy Engineering Sciences Interdisciplinary Graduate School Of Engineering
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Higashi Seiichiro
Department Of Semiconductor Electronics And Integration Science Graduate School Of Advanced Sciences
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下田 達也
Seiko Epson Corporation
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Higashi Seiichiro
Department of Electrical Engineering, Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima 739-8530, Japan
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Kawai Yoshinobu
Department of Advanced Energy Engineering Science,
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下田 達也
Center For Nano Materials And Technology Japan Advanced Institute Of Science And Technology
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Komori Akio
Department Of High Energy Engineering Science Kyushu University Kasuga
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Komori Akio
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Kawai Yoshinobu
Interdiciplinary Gradate School Of Engineering Sciences Kyushu University
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INOUE Satoshi
Seiko Epson Corporation
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SHIMODA Tatsuya
Seiko Epson Corporation
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ABE Daisuke
Seiko Epson Corporation, Technology Platform Research Center
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Sameshima T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Sameshima Toshiyuki
Tokyo University Of Agriculture And Technology
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Sameshima Toshiyuki
Sony Research Center
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Inoue S
Frontier Device Research Center Seiko Epson Corporation
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Sakamoto Keiji
Tokyo University Of Agriculture And Technology
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Komori A
National Inst. Fusion Sciences Nagoya‐shi Jpn
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Komori Akio
Department Of Electronic Engineering Tohoku University
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Tanaka Masayoshi
Department Of Frontier Materials Graduate School Of Engineering Nagoya Institute Of Technology
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Sakamoto K
Tohoku Univ. Miyagi Jpn
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Sakamoto Kunihiro
Electrotechnical Laboratory (etl)
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Sameshima Toshiyuki
Tokyo A&t University
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Tanaka Masayoshi
Department Of Clinical Technology Kobe Tokiwa College
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Izumi S
Division Of Oral Cytology And Cell Biology Nagasaki University Graduate School Of Biomedical Science
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小森 章夫
核融合科学研究所
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Sakamoto Kenji
Institute Of Fluid Science Tohoku University
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Tanaka Masayoshi
Department Of Chemical Science & Technology Faculty Of Engineering Kyushu University
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Tanaka Masayoshi
Department of Advanced Energy Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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河野 光雄
中央大総合政策
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田中 通義
東北大多元研
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河合 良信
九大総理工
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HIROSHIMA Yasushi
Technology Platform Research Center, Seiko Epson Cooperation
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ABE Daisuke
Technology Platform Research Center, Seiko Epson Cooperation
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MORIMURA Taro
Ulvac, Inc., Chiba Institute for Super Materials
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SARRO Kazuya
Ulvac, Inc., Chiba Institute for Super Materials
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Morimura Taro
Ulvac Inc. Chiba Institute For Super Materials
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Morii Mikio
Tokyo Inst. Technol. Tokyo
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HIGASHI Seiichiro
Base Technology Research Center, Seiko Epson Corp.
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ABE Daisuke
Base Technology Research Center, Seiko Epson Corp.
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INOUE Satoshi
Base Technology Research Center, Seiko Epson Corp.
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SHIMODA Tatsuya
Base Technology Research Center, Seiko Epson Corp.
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Kawai Y
Welding Research Institute Osaka University
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庄山 裕章
九大 総理工
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Sarro Kazuya
Ulvac Inc. Chiba Institute For Super Materials
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HlGASHI Seiichiro
Seiko Epson Corporation, Technology Platform Research Center
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HIROSHIMA Yasushi
Seiko Epson Corporation, Technology Platform Research Center
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MlYASHlTA Kazuyuki
Seiko Epson Corporation, Technology Platform Research Center
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KAWAMURA Takahiro
Seiko Epson Corporation, Technology Platform Research Center
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Kono Mitsuo
Faculty Of Policy Studies Chuo University
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TANAKA Masayoshi
National Institute for Fusion Science
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Shimoda Tatsuya
Base Technology Research Center Seiko Epson Corporation
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WATANABE Tadashi
Tokyo University of Pharmacy and Life Science
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原田 信洋
Ube Industries Ltd.
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NISHIMOTO Ryuji
Department of High Energy Engineering Science,Interdisciplinary Graduate School of Engineering Scien
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HARADA Nobuhiro
Ube Industries Ltd.
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OHI Takeshi
Central Research Laboratory,Mitsubishi Electric Corporation
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原田 信洋
九大総理工
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Kawai Y
Mitsubishi Materials Silicon Corporation
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TAMAOKI Makoto
Department of High Energy Engineering Science, Kyushu University Kasuga
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MATSUOKA Morito
NTT Opto-Electronics Laboratories, NTT Corporation
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Tamaoki Makoto
Department Of High Energy Engineering Science Kyushu University Kasuga
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Matsuoka Morito
Ntt Opto-electronics Laboratories
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Matsuoka Morito
Ntt Opto-electronics Laboratories Ntt Corporation
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SHOYAMA Hiroaki
Department of High Energy Engineering Science,Kyushu University
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庄山 裕章
Department Of High Energy Engineering Science Kyushu University
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Ozaki K
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Ohi Takeshi
Central Research Laboratory Mitsubishi Electric Corporation
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Kano Y
Tokyo University Of Agriculture And Technology
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Shoyama Hiroaki
Department Of High Energy Engineering Science Kyushu University
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Kawamura Takahiro
Seiko Epson Corporation Technology Platform Research Center
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OZAKI Kentaro
Tokyo University of Agriculture and Technology
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ASADA Katsumi
Tokyo University of Agriculture and Technology
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Kano Yoshiaki
Tokyo University of Agriculture and Technology
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Saito Kazuya
Ulvac, Inc., Chiba Institute for Super Materials, 523 Yokota, Sanbu-machi, Sanbu-gun, Chiba 289-1226
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西本 竜樹
Department Of High Energy Engineering Science Interdisciplinary Graduate School Of Engineering Scien
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Nishimoto Ryuji
Department Of High Energy Engineering Science Interdisciplinary Graduate School Of Engineering Scien
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Hiroshima Y
Technology Platform Research Center Seiko Epson Cooperation
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Mlyashlta Kazuyuki
Seiko Epson Corporation Technology Platform Research Center
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Watanabe Tadashi
Tokyo University Of Agriculture And Technology
著作論文
- High-Quality Gate-SiO_x and SiO_x/Si Interface Formation at Low Temperature Using Plasma-Enhanced Chemical Vapor Deposition
- Low-Temperature Formation of Device-Quality SiO_2/Si Interfaces Using Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition
- High-Quality SiO_2/Si Interface Formation and Its Application to Fabrication of Low-Temperature-Processed Polycrystalline Si Thin-Film Transistor(Semiconductors)
- Overdense Plasma Production Using Electron Cyclotron Waves
- New Microwave Launcher for Producing ECR Plasmas without Window Contamination I. : Excitation of Electron Cyclotron Wave
- Stochastic Electron Acceleration by an Electron Cyclotron Wave Propagating in an Inhomogeneous Magnetic Field
- Heat Treatment with High-Pressure H_2O Vapor of Pulsed Laser Crystallized Silicon Films
- Electrical Properties of Excimer-Laser-Crystallized Lightly Doped Polycrystalline Silicon Films