Electron Optical Properties of Microcolumn with Field Emitter
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概要
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We present the electron optical properties of a newly designed microcolumn. The microcolumn consists of an objective lens and an electron gun, which is composed of a microscale field emitter and a condenser lens. An acceleration lens was used as the objective lens. Each component was optimized to maximize its own function while minimizing its impact on the functions of the other components. The current--voltage characteristics of each electrode were evaluated. The current variation characteristics of each electrode indicated that each optimized structure could be used to control the electron beam. The objective lens could also focus the electron beam to a diameter of approximately 40 μm at a working distance of 2 mm and 400\times magnification when no acceleration electric field was applied between the microcolumn and the anode.
- 2013-03-25
著者
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YOSHIDA Tomoya
National Institute of Advanced Industrial Science and Technology
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Neo Yoichiro
Reseach Institute Of Electrical Communication Tohoku University
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Murata Hidekazu
Faculty Of Engineering Kyoto University
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Fujino Takahiro
Research Institute For Advanced Science And Technology Osaka Prefecture University
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Nagao Masayoshi
National Institute of Advanced Industrial Science & Technology (AIST)
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Koike Akifumi
Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, Japan
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Mimura Hidenori
Reseach Institute of Electrical Communication, Tohoku University,
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Nagao Masayoshi
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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Nishi Takashi
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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