Epitaxial Growth of Aluminum on Silicon Substrates by Metalorganic Molecular Beam Epitaxy using Dimethyl-Ethylamine Alane
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-05-01
著者
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NEO Yoichiro
Research Institute of Electronics, Shizuoka University
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MIMURA Hidenori
Research Institute of Electronics, Shizuoka University
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Neo Yoichiro
Shizuoka Univ. Hamamatsu Jpn
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YOKOO Kuniyoshi
Research Institute of Electrical Communication, Tohoku University
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Neo Yoichiro
Reseach Institute Of Electrical Communication Tohoku University
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OTODA Toshihiro
Reseach Institute of Electrical Communication, Tohoku University
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SAGAE Katumi
Reseach Institute of Electrical Communication, Tohoku University
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