Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior
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概要
- 論文の詳細を見る
In chemical mechanical polishing (CMP), the slurry flow behavior on the polishing pad is very important both for improving polishing effectiveness and for reducing the slurry consumption. In this study, we aim to evaluate two types of CMP pad that have unique special groove patterns, slurry outflow and inflow pads, for controlling the slurry flow behavior. We describe the effect of the groove patterns on the slurry flow behavior observed using images recorded using a high-speed digital camera. The results of the study indicate several advantages of the proposed pads over the conventional pads from the viewpoint of slurry flow behavior.
- 2012-05-25
著者
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Ohnishi Osamu
Department Of Applied Chemistry Faculty Of Engineering Hiroshima University
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Uneda Michio
Department Of Mechanical Engineering Kanazawa Institute Of Technology
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Kurokawa Syuhei
Department Of Intelligent Machinery And Systems Kyushu University
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Yamazaki Tsutomu
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Doi Toshiro
Department of Education, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
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Aida Hideo
Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi-ku, Tokyo 123-8511, Japan
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Seshimo Kiyoshi
Department of Mechanical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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Uneda Michio
Department of Mechanical Engineering, Kyushu University, Fukuoka 819-0395, Japan
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