Performance Evaluation Method of Chemical Mechanical Polishing Pad Conditioner Using Digital Image Correlation Processing
スポンサーリンク
概要
- 論文の詳細を見る
In chemical mechanical polishing (CMP), conditioning is generally used for the regeneration of the pad surface texture. Currently, the performance evaluation of conditioners depends on the user's experience so that it is important to develop a novel quantitative evaluation method for conditioner performance. In this paper, we propose a novel evaluation method for conditioner performance using digital image correlation (DIC) processing. The proposed method can measure the in-plane micro-deformation distribution of the pad surface texture by conditioning. It is found that a pad surface deforms over 40 μm with conditioning and that the in-plane deformation value increases with a decrease in the mesh size of conditioner grains.
- 2012-05-25
著者
-
Ohnishi Osamu
Department Of Applied Chemistry Faculty Of Engineering Hiroshima University
-
Uneda Michio
Department Of Mechanical Engineering Kanazawa Institute Of Technology
-
Kurokawa Syuhei
Department Of Intelligent Machinery And Systems Kyushu University
-
Doi Toshiro
Department of Education, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
-
Omote Tatsunori
Department of Mechanical Engineering, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921-8501, Japan
-
Ishikawa Ken-ichi
Department of Mechanical Engineering, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921-8501, Japan
-
Ichikawa Koichiro
Fujikoshi Machinery Corporation, Nagano 381-1233, Japan
-
Uneda Michio
Department of Mechanical Engineering, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921-8501, Japan
-
Kurokawa Syuhei
Department of Mechanical Engineering, Kyushu University, Fukuoka 819-0395, Japan
関連論文
- GM-06 TRANSIENT PHENOMENON OF CHIP GENERATION AND ITS MOVEMENT IN HOBBING : JAMMING OF CHIP FORMED IN GENERATING ON FINISHED SURFACE IN FLYTOOL SIMULATION TESTS(MANUFACTURING OF GEARS)
- GSD-21 A FUNDAMENTAL STUDY ON THE SURFACE DURABILITY OF AUSTEMPERED DUCTILE IRON (ADI) GEARS IN LONG LIFE REGION(GEAR STRENGTH AND DURABILITY, INCLUDING GEAR MATERIALS AND HEAT TREATMENT TECHNIQUES)
- Electrolytic Behavior of Iodo - and Chlorosilanes. The Formation of Si-Si and Si-sp-C Bonds^1
- Tungsten Film Chemical Mechanical Polishing Using MnO2 Slurry
- GDN-01 INFLUENCE OF GEAR ECCENTRICITY ON SIDEBANDS OF MESH FREQUENCY : DERIVATION AND DETECTION OF AMPLITUDE MODULATION BY TRANSMISSION ERROR MEASUREMENT(DYNAMICS AND NOISE PROBLEMS OF GEARS AND GEAR BOXES)
- 203 A STUDY ON BASIC PERFORMANCE COMPARISON WITH ACOUSTIC HOLOGRAPHY AND MUSIC METHODS IN SOUND SOURCE IDENTIFICATION(O.S.4 Measurement and Sensor I)
- GI-1 TRANSMISSION ERROR ANALYSIS WITH ECCENTRICITY OF INVOLUTE CYLINDRICAL GEARS(GEAR INSPECTION)
- Dielectric SiO Planarization Using MnO Slurry
- Frictional Characterization of Chemical–Mechanical Polishing Pad Surface and Diamond Conditioner Wear
- Fast Diffusion of Water Molecules into Chemically Modified SiO_2 Films Formed by Chemical Vapor Deposition
- Real-Time Evaluation of Tool Flank Wear by In-Process Contact Resistance Measurement in Face Milling
- Performance Evaluation Method of Chemical Mechanical Polishing Pad Conditioner Using Digital Image Correlation Processing
- Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior
- Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers
- Study on Factors in Time-Dependent Dielectric Breakdown Degradation of Cu/Low-$k$ Integration Related to Cu Chemical–Mechanical Polishing
- Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface
- Effect of Pad Surface Roughness on SiO2 Removal Rate in Chemical Mechanical Polishing with Ceria Slurry
- Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface (Special Issue : Advanced Metallization for ULSI Applications)
- Derivation of Path of Contact and Tooth Flank Modification by Minimizing Transmission Error on Face Gear