Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface (Special Issue : Advanced Metallization for ULSI Applications)
スポンサーリンク
概要
著者
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Uneda Michio
Department Of Mechanical Engineering Kanazawa Institute Of Technology
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Omote Tatsunori
Department of Mechanical Engineering, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921-8501, Japan
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Ishikawa Ken-ichi
Department of Mechanical Engineering, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921-8501, Japan
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Nakamura Yoshio
Fujikoshi Machinery Corporation, Matsushiro, Nagano 381-1233, Japan
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Shibuya Kazutaka
Fujikoshi Machinery Corporation, Matsushiro, Nagano 381-1233, Japan
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Ichikawa Daizo
Fujikoshi Machinery Corporation, Matsushiro, Nagano 381-1233, Japan
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- Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface
- Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface (Special Issue : Advanced Metallization for ULSI Applications)