Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces
スポンサーリンク
概要
- 論文の詳細を見る
A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 \times 4 mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector.
- 2011-06-25
著者
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Sohgawa Masayuki
Graduate School Of Engineering Science Osaka University
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Kanashima Takeshi
Graduate School Of Engineering Science Osaka University
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Okuyama Masanori
Institute for NanoScience Design, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Sohgawa Masayuki
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Hirashima Daiki
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Uematsu Tatsuya
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Mito Wataru
Advanced Telecommunication Research Institute International, Seika, Kyoto 619-0288, Japan
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Noma Haruo
Advanced Telecommunication Research Institute International, Seika, Kyoto 619-0288, Japan
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Kanashima Takeshi
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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