Effects of Ga Doping and Substrate Temperature on Electrical Properties of ZnO Transparent Conducting Films Grown by Plasma-Assisted Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Transparent conducting ZnO films are deposited by plasma-assisted deposition on glass and plastic substrates at temperatures as low as 50 °C. The effects of Ga doping and growth temperature on electrical properties are studied using Hall measurement and X-ray diffraction. Carrier density increases with Ga doping for both 50 and 300 °C growth. For low-temperature growth, the carrier mobility in undoped ZnO films is the same as that in high-temperature-grown films, but it becomes lower as the Ga doping level becomes higher. Lattice expansion in both $c$ and $a$ axes directions is observed for low-temperature-grown highly Ga-doped films. The relation between the mobility reduction and the lattice expansion is discussed.
- 2011-05-25
著者
-
Horii Takahiro
Department Of Microsystem Engineering Nagoya University:(present Address)kubota Co. Ltd.)
-
Nabetani Yoichi
Department Of Electrical Engineering Yamanashi University
-
Matsumoto Takashi
Department Of Applied Physics Waseda University
-
Yashiro Kouji
Yamanashi Industrial Technology Center, Kofu 400-0055, Japan
-
Kono Hiroshi
Yamanashi Industrial Technology Center, Kofu 400-0055, Japan
-
Mizuguchi Keiichi
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Sano Shiho
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Muranaka Tsutomu
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Hiraki Satoshi
Nakaya Corporation, Showa, Yamanashi 409-3853, Japan
-
Furukawa Hideaki
Nakaya Corporation, Showa, Yamanashi 409-3853, Japan
-
Fukasawa Akihiro
Nakaya Corporation, Showa, Yamanashi 409-3853, Japan
-
Sakamoto Shingo
Nakaya Corporation, Showa, Yamanashi 409-3853, Japan
-
Hagihara Shigeru
Yamanashi Industrial Technology Center, Kofu 400-0055, Japan
-
Kijima Kazuhiro
Yamanashi Industrial Technology Center, Kofu 400-0055, Japan
-
Abe Osamu
Yamanashi Industrial Technology Center, Kofu 400-0055, Japan
-
Nabetani Yoichi
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Horii Takahiro
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Matsumoto Takashi
Department of Electrical Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Matsumoto Takashi
Department of Applied Material Science, Faculty of Integrated Arts and Sciences, University of Tokushima
-
Matsumoto Takashi
Department of Applied Material Science, Faculty of Integrated Arts and Science, University of Tokushima
関連論文
- ISO-6 Impact of deficiency of tumor suppressor genes on tumor development in uterine cervix of IGF-1 transgenic mice(Group1 Oncology,International Session: Oral Presentation)
- Electrocardiography-triggered high-resolution CT for reducing cardiac motion artifact : evaluation of the extent of ground-glass attenuation in patients with idiopathic pulmonary fibrosis
- PACS for Multi-slice CT : Seamless Integration Implementing 3D and 4D Workstations
- Coronal Multiplanar Reconstruction View from Isotropic Voxel Data Sets Obtained with Multidetector-row CT : Assessment of Detection and Size of Mediastinal and Hilar Lymph Nodes
- Technical Application of Three-dimensional Visualization and Measurement for Breast Cancer Using Multidetector-row CT Scanner
- Synthesis of Pyrrolo[1,2-a]quinoxaline Derivatives by Lewis Acid-Catalyzed Reactions of 1-(2-Isocyanophenyl)pyrroles
- Intracranial Arterial Vasospasm Associated with Pituitary Apoplexy after Head Trauma : Case Report
- Raman Spectral Behavior of In_Ga_xP (0
- Strain-Induced Shift of Optical Phonon Frequency in InGaP Layers Grown on GaAs Substrates
- Strain-Energy-Stabilized Growth of InGaAsP Layers on GaAs (111)A Substrates in Immiscible Region
- Narrow Photoluminescence Spectra in InGaAsP/GaAs (001) LPE Layers Grown in the Immiscible Region
- Photoluminescence of InGaP/GaAs (111) LPE Layers with Elastic Strain due to Lattice Mismatch
- Raman Study of Misfit Strain and Its Relaxation in ZnSe Layers Grown on GaAs Substrates
- Influence of Phosphorus Evaporation from Melt on InGaP/GaAs LPE Growth
- LPE Growth of In_Ga_xAs_P_y with Narrow Photoluminescence Spectrum on GaAs (111)B Substrates
- Photoluminescence Processes of Zn-Doped In_Ga_xP with 0.6
- Electrical Properties of Zn-Doped In_Ga_xP
- Luminescence of Zn Diffused In_ ,Ga_xP in the Direct Transition Region
- Near-Bandgap Photoluminescence in Te-Doped In_Ga_xP (0.2≲x≲0.5)
- Improvement of Coupling-Out Efficiency of Organic Light-Emitting Devices by Dot Array Structures with Organic Layer(Fabrication of Organic Nano-devices)(Recent Progress in Organic Molecular Electronics)
- K1-12 Impact of Bax deficiency on tumor development of uterine cervix in IGF-1 transgenic mice
- P3-IS-12 Impact of PTEN deficiency on tumor development of uterine cervix in IGF-1 transgenic mice(Group86 Oncology2,International Session)
- Peri-selectivity in Thermolysis of Acyloxybenzocyclobutenes Possessing α,β-Unsaturated Carbonyl Group : Synthesis of 2-Benzoxocin Derivatives
- Single-Step Synthesis of Cyclooctadienone Derivatives by Reaction of Alkenylcyclobutenones with Alkenyllithiums : Enhanced Reactivity of 8π Cyclization by Acetylating the Intermediary Lithium Tetraenolate
- PB163 Stereocontrolled Total Synthesis of Mycinamicin IV
- Diagnostic Problems of Early and Primary Lesions of Tuberculous Cervical Lymphadenitis
- Non-Stationary Effect on the Behavior of an On-Off Ratchet
- Punctuated Equilibrium Behavior and Zipf's Law in the Stochastic Branching Process Model of Phylogeny
- Effect of the Non-Stationary Fluctuations in the Morphogenetic Evolution of Heteromorph Ammonites : Condensed Matter and Statistical Physics
- Nitrated and Oxidized Products of a Single Tryptophan Residue in Human Cu,Zn-Superoxide Dismutase Treated with Either Peroxynitrite-Carbon Dioxide or Myeloperoxidase-Hydrogen Peroxide-Nitrite
- ISCHEMIC PRECONDITIONING IMPROVES GLUTATHIONE STRESS AGAINST ISCHEMIA-REPERFUSION INJURY IN RAT HEARTS.
- P1-IS-23 Impact of p53 deficiency on tumor development of uterine cervix in IGF-1 transgenic mice
- P1-IS-21 Investigation of serum secretory leukocyte protease inhibitor (SLPI) level in uterine corpus cancer.
- P-IS-16 Overexpression of insulin-like growth factor-1 in epithelium of uterine cervix results in cervical neoplasia in transgenic mice(Oncology 4,Group 91,International Session)
- Suppression of Collagen-Induced Arthritis in DBA/1J Mice by Preimmunization with House Dust Mite Extract
- Roles of Functional Loops and the C-Terminal Segment of a Single-Stranded DNA Binding Protein Elucidated by X-Ray Structure Analysis
- Optical Investigation of Critical Thickness and Interface Fluctuation in CdSe/ZnSe Strained Layer Superlattices Grown on InP
- Synthesis of Pyrrolo[1,2-a]quinoxaline and Its 4-(1-Hydroxyalkyl) Derivatives by Lewis Acid-Catalyzed Reactions of 1-(2-Isocyanophenyl)pyrrole
- Hydrozirconation of Allenyl Sulfide for Generating γ-Thio-substituted Allylzirconium Species and Its Reaction with Carbonyl Compounds
- Quality Variation of ZnSe Heteroepitaxial Layers Correlated with Nonuniformity in the GaAs Substrate Wafer : Semiconductors and Semiconductor Devices
- Variation of Misfit Strain in ZnSe Heteroepitaxial Layers with Temperature, Layer thickness and Growth Temperature : Semiconductors and Semiconductor Devices
- Electrical and Luminescent Properties of In-Doped ZnSe Grown by Low-Pressure Vapor-Phase Epitaxy
- Estimation of Grown Layer Thickness by Cathodoluminescence Measurement
- Mitral Valve Replacement using Bileaflet Mechanical Prosthetic Valve in the First Year of Life
- Overexpression of c-src in epithelium of uterine cervix results in cervical intraepithelial neoplasia (CIN) in transgenic mice(Oncology 5)
- Poly I:C induces a reduction of voluntary physical activity, but it is not involved with interferon-beta pathway in mice
- EFFECTS OF PROSTAGLANDIN E2 PRODUCTION ON LPS-INDUCED REDUCTION IN WHEEL-RUNNING ACTIVITY IN MICE(Proceedings of The 8^ Asian Federation of Sports Medicine Congress 2005 Tokyo)
- Interface States in n-ZnSe/n-GaAs Heterostrueture Characterized by Deep Level Transient Spectroscopy Technique
- Chronic, Traumatic Intraconal Hematic Cyst of the Orbit Removed Through the Fronto-orbital Approach : Case Report
- IS-36 Overexpression of growth factors/oncogenes in epithelium of uterine cervix results in cervical intraepithelial neoplasia (CIN) in transgenic mice(Group5 Oncology5,International Session)
- A 65 nm Complementary Metal--Oxide--Semiconductor 400 ns Measurement Delay Negative-Bias-Temperature-Instability Recovery Sensor with Minimum Assist Circuit
- Mukaiyama Aldol Reaction of Ester Acceptors : Organoaluminums Catalyze Nucleophilic Addition of Ketene Silyl Acetals
- Single Step Synthesis of Cyclooctadienone Derivatives by Reaction of Cyclobutenones with Dienyllithium
- Synthesis of Functionalized Cyclobutene Derivatives via Selective S_N2' Reaction of Dichlorocyclobutenes
- Synthesis of Benzocyclooctene Derivatives via Thermal Ring Expansion of Dienylbenzocyclobutenes
- Transcriptional analysis of the ylaABCD operon of Bacillus subtilis encoding a sigma factor of extracytoplasmic function family
- Organization and Expression of the Bacillus subtilis sigY Operon
- Effective range of reproductive interference exerted by an alien dandelion, Taraxacum officinale, on a native congener
- Experimental Studies on Supersonic Combustion Phenomena of CO-O_2-H_2 Premixed Gases around Hypersonic Projectiles
- Solution Growth of CuGaS_2 Using In as a Solvent under Controlled S Vapor Pressure
- Multi-Input Floating Gate Differential Amplifier and Applications to Intelligent Sensors (Special Section on Analog Circuit Techniques and Related Topics)
- Primary Tissue Failure of the Freestyle Stentless Aortic Root Bioprosthesis
- Iridociliary Melanocytoma with Suspected Pulmonary Metastasis
- PRMA/URN with Enhanced Access Control for CDMAEnvironment
- Structural Properties of Epitaxial ZnS on Ge Substrates
- A Mutation Study of the DNA Binding Domain of Human Papillomavirus Type11 E2 Protein^1
- Pair Luminescence from Zn-Doped GaN
- Bayesian Reconstructions and Prediction of Nonlinear Dynamical System : Hybrid Monte Carlo
- Toward Epitaxial Growth of CuGaS_2 on GaAs(001) Substrates by Chloride Chemical Vapor Deposition
- Low Pressure Vapor Phase Epitaxy of High Purity ZnSe Using Metallic Zinc and Selenium as Source Materials
- Growth of High-Quality ZnSe Layers in Hydrogen Plasma
- 1-15.Overexpression of transforming growth factor-α(TGF-α) in epithelium of uterine cervix results in cervical intraepithelial neoplasia(CIN) in transgenic mice(Session 1 Oncology 1)
- A Low Power Matched Filter for DS-CDMA Based on Analog Signal Processing
- Absorption and Reflection of Vapor Grown Single Crystal Platelets of β-Ga_2O_3
- Refractive Index of β-Ga_2O_3
- Temperature Dependence of Photoluminescence from GaN
- Effects of Built-In Strain on Luminescence and Absorption Spectra of GaN Epitaxial Crystals
- P-273 Synthetic Study of the Pluramycins
- Large Encephalocele at the Anterior Fontanel : Case Report
- Significant increase in the expression of matrix metalloproteinase 7 in primary CNS lymphoma
- Total Synthesis of the Gilvocarcins
- Chloride Multi-Source Epitaxial Growth of CuGaS_2 and CuGaSe_2
- Vapor Phase Epitaxial Growth of ZnSe Using Zinc and Selenium as Source Materials
- C-Glycosylation-Cycloaddition Approach to C-Glycosyl Juglones. Versatile Intermediates toward Aryl C-Glycoside Antibiotics
- Isolation and characterization of novel human monoclonal antibodies possessing neutralizing ability against rabies virus
- Concise Synthesis of (±)-γ-Indomycinone
- P-281 A Facile and Highly Enantioselective Synthesis of Axially Chiral Biaryls by Enzymatic Desymmetrization and Its Application to Natural Product Synthesis
- Anisotropy of Photovoltaic Properties of Au-CdSnP_2 Diodes : III-1: II-VI COMPOUND SOLAR CELLS
- Chaotic Synchronization and Masking in Electronic Circuits
- Spatial and Temporal Dynamics of Vision Chips Including Parasitic Inductances and Capacitances (Special Section on Selected Papers from the 11th Workshop on Circuits and Systems in Karuizawa)
- Short-Circuit Destruction of Field-Stop-Structure Inslated Gate Bipolar Transistor
- Chemical Vapor Deposition of CuGaS_2 Using Chloride Sources
- Role of CTGF/CCN2 in reparative dentinogenesis in human dental pulp
- Effects of Ga Doping and Substrate Temperature on Electrical Properties of ZnO Transparent Conducting Films Grown by Plasma-Assisted Deposition
- Epitaxial Growth of ZnS by Zn-S-H_2 CVD Method
- ISO-1-5 Overexpression of E2F transcription factor 1 in epithelium of uterine cervix results in development of squamous cell carcinoma in transgenic mice(Group 1 Oncology,IS Award Candidate,International Session)
- Synthetic Studies of the Flavone Derivatives. II. The Synthesis of Meliternatin and Some 3,5-Dimethoxy-6,7-methylenedioxyflavones
- Synthetic Studies of the Flavone Derivatives. III. The Synthesis of 3,7-Dimethoxy-5,6;3′,4′-bismethylenedioxyflavone, an Isomer of Meliternatin
- Optical and Structural Properties of Zn--Cd--Mn--Se Double Quantum Well Systems