Nondestructive Testing Technique for Defect Detection in LiNbO3 Using Infrared Thermal Imaging Camera
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概要
- 論文の詳細を見る
The existence of defects in lithium niobate (LiNbO3) degrades the specific properties required of LiNbO3 as substrate material, which is a major problem inhibiting device constructions. For the purpose of providing a convenient and quick tool for use in a nondestructive testing technique for defect detection, the feasibility of using an infrared thermal imaging camera (IR camera) is examined by comparing the results of IR camera use with those of two methods, scanning laser microscopy (SLM) and light scattering tomography (LST). We have succeeded in the detection of defects in the LiNbO3 substrate by observing the thermal properties of defects in a relatively wide field of view ($8\times 6$ mm2) compared with the case of using conventional microscopes. The maximum temperature difference of the defects in the LiNbO3 substrate was 0.47 K.
- 2010-07-25
著者
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Lee Kunyong
Department Of Materials Science And Engineering National Defense Academy
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Miyazaki Hisashi
Department Of Applied Physics Osaka City University
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Morimoto Jun
Department Of Applied Physics National Defense Academy
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Okamoto Yoichi
Department Of Applied Physics National Defense Academy
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Toda Kohji
Departmemt Of Electronic Engineering National Defense Academy
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Toda Kohji
Department of Mechanical Systems Engineering, Tokyo City University, 1-28-1 Tamazutsumi, Setagaya, Tokyo 158-8557, Japan
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Lee Kunyong
Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan
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