Studies of Defect Detection and Thermal Influence in Semi-Insulating 6H-SiC Substrates Using a Long-Wavelength Infrared Thermal Imaging Camera
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概要
- 論文の詳細を見る
- 2010-08-25
著者
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MIYAZAKI Hisashi
Department of Physical Electronics, Tokyo Institute of Technology
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WUTIMAKUN Passapong
Department of Industrial Engineering, Chulachomklao Royal Military Academy
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LEE Kunyong
Department of Materials Science and Engineering, National Defense Academy
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MORIMOTO Jun
Department of Materials Science and Engineering, National Defense Academy
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Lee Kunyong
Department Of Materials Science And Engineering National Defense Academy
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Wutimakun Passapong
Department Of Industrial Engineering Chulachomklao Royal Military Academy
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Miyazaki Hisashi
Department Of Materials Science And Engineering National Defense Academy
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Miyazaki Hisashi
Department Of Applied Physics Osaka City University
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Morimoto Jun
Department Of Applied Physics National Defense Academy
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