Distribution of Deep Level Parameters in Spectral Analysis of DLTS (SADLTS) : Electrical Properties of Condensed Matter
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概要
- 論文の詳細を見る
It is shown that one can estimate the broadening parameters of both the capture cross section σ and the activation energy E of a deep level from the emission rate spectrum S(λ,T) of the transient capacitance ΔC(t,T) obtained in a spectral analysis of the DLTS(SADLTS) proposed in our previous paper. Numerical examples are given to illustrate typical cases of interest for an idealized model of independent Gaussian distributions, f(σ) and g(E). In general, S(λ,T) is a convolution of f and g with its higher and lower λ side characterized by broadening parameters for σ and E, respectively. A simple formula is derived in order to obtain the central value E of the activation energy.
- 社団法人応用物理学会の論文
- 1988-04-20
著者
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MORIMOTO Jun
Department of Materials Science and Engineering, National Defense Academy
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TAHIRA Kenichiro
Department of Electrical and Electronic Engineering, National Defense Academy
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MIYAKAWA Toru
Department of Materials Science and Engineering, The National Defense Academy
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MIYAKAWA Toru
Dept. of Materials Science and Engineering, National Defense Academy
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Miyakawa T
Dept. Of Materials Science And Engineering National Defense Academy
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Morimoto Jun
Department Of Applied Physics National Defense Academy
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Miyakawa Toru
Department Of Applied Physics The National Defense Academy
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