High-$k$ HfxGdyOz Charge Trapping Layer in Silicon–Oxide–Nitride–Silicon Type Nonvolatile Memory by In situ Radio Frequency Dual-Sputtering Method
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概要
- 論文の詳細を見る
In this paper, we propose a novel non-volatile memory (NVM) with a HfxGdyOz trapping layer prepared by RF dual sputtering for the first time. A higher programming/erasing (P/E) speed and a longer data retention time can be obtained owing to improved trapping ability of HfGdO. Furthermore, in situ RF dual sputtering of HfxGdyOz MHHHS (metal/HfO2/HfxGdyOz/HfO2/Si) is a promising technology for future NVM because of its simplicity and its material compatibility in the semiconductor industry.
- 2009-05-25
著者
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Lai Chao-sung
Department Of Electronic Engineering Chang Gung University
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FANG Yu-Ching
Chung-Shan Institute of Science & Technology Materials & Electro-Optics Research Division
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HSU Li
Chung-Shan Institute of Science & Technology Materials & Electro-Optics Research Division
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WANG Hui-Chun
Chung-Shan Institute of Science & Technology Materials & Electro-Optics Research Division
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Wang Jer-chyi
Department Of Electronic Engineering Chang Gung University
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Wang Hui-Chun
Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, Lung-Tan, Tao-Yuan 32500, Taiwan
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Chou Pai-Chi
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
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Wu Woei-Cherng
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
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Liu Li-Chi
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
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Lai Chao-Sung
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
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Hsu Li
Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, Lung-Tan, Tao-Yuan 32500, Taiwan
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Fang Yu-Ching
Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, Lung-Tan, Tao-Yuan 32500, Taiwan
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