Thickness Effects on pH Response of HfO_2 Sensing Dielectric Improved by Rapid Thermal Annealing
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Lai Chao-sung
Department Of Electronic Engineering Chang Gung University
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Lu Tseng-fu
Department Of Electronic Engineering Chang Gung University
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Yang Chia-ming
Department Of Electronic Engineering Chang Gung University
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YANG Chia-Ming
Department of Electronic Engineering, Chang Gung University
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