Differential Light Addressable Potentiometric Sensor with Poly(vinyl chloride) and HfO2 Membranes for pH Sensors

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概要

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• In this paper, a differential measurement setup for the light addressable potentiometric sensor (LAPS) is proposed. The LAPS with a HfO2 layer as the sensing membrane was used, and different weight percentages of $\mathrm{DNP}/(\mathrm{PVC}+\mathrm{DNP})$ [DNP: dinonylphtalate, PVC: poly(vinyl chloride)] membrane were cast on the surface of HfO2-LAPS. The pH sensitivity can be decreased from 58.6 to 24.5 mV/pH by using 60 wt % PVC cocktail. Then, the pH sensitivity measured through a differential circuit was 30.1 mV/pH, showing high potential for replacing the function of a conventional reference electrode as an ion-sensitive field-effect transistor (ISFET)/reference field-effect transistor (REFET) pair. In addition, to confirm the output signal of the two substrate electrodes, a specific measurement setup was used.

• 2010-04-25

著者

• Lai Chao-sung

  Department Of Electronic Engineering Chang Gung University

• Lue Cheng-en

  Department Of Electronic Engineering Chang Gung University

• Wang Jer-chyi

  Department Of Electronic Engineering Chang Gung University

• Chia-Ming Yang

  Wafer Acceptance Test & Device Department, Inotera Memories Inc., Taoyuan 333, Taiwan

• Ching-Mie Wu

  Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 333, Taiwan

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