Light Addressable Potentiometric Sensor with Fluorine-Terminated Hafnium Oxide Layer for Sodium Detection
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概要
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In this study, post-CF4 plasma surface treatment of light addressable potentiometric sensor (LAPS) with a HfO2-sensing membrane was carried out. pH sensitivity decreased but pNa sensitivity increased with fluorine incorporation. The highest pNa sensitivity was 31.8 mV/pNa, which was optimized with 3 min post CF4 plasma treatment. The results showed a high possibility for sensing sodium ions using an inorganic-sensing membrane and a fabrication process. Moreover, on the basis of the analysis of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) spectra, a sensing mechanism was developed.
- 2010-04-25
著者
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Lai Chao-sung
Department Of Electronic Engineering Chang Gung University
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Lue Cheng-en
Department Of Electronic Engineering Chang Gung University
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Chen Hsin-yu
Department Of Pharmacy Liouying Chi-mei Medical Center
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Hsin-Yu Chen
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 333, Taiwan
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Chia-Ming Yang
Device Section in Department of WAT and Device, Inotera Memories Inc., 667 Fuhsing 3rd Road, Hwa-Ya Technology Park, Kwei-Shan, Taoyuan 333, Taiwan
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Cheng-En Lue
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 333, Taiwan
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