Growth and characterization of SiC films by hot-wire chemical vapor deposition at low substrate temperature using SiF4/CH4/H-2 mixture
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概要
- 論文の詳細を見る
Microcrystalline SiC films were grown by hot-wire chemical vapor deposition (HW-CVD) at a low substrate temperature using a SiF4/CH4/H2 mixture, and their structural properties were characterized. Low growth pressure resulted in a narrow full width at half maximum (FWHM) of the Si–C peak in Fourier transform infrared absorption spectroscopy (FT-IR) spectra. The deposition rate and the FWHM value increased with increasing filament temperature. This seemed to be caused by change of the concentration ratio of precursors on the growth surface with increasing filament temperature. Also, the film crystallinity depended on the CH4/SiF4 flow rate ratio, and μc-3C-SiC(111) films were successfully obtained at low substrate temperature of 250 °C.
- INST PURE APPLIED PHYSICSの論文
- 2008-01-25
著者
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Abe K
Department Of Applied Biological Chemistry Graduate School Of Agricultural And Life Sciences The Uni
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SAKURAI Takuya
Department of Molecular Predictive Medicine and Sport Science, Kyorin University, School of Medicine
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Kida Takahiro
Department of Cardiology, Ninon University Surugadai Hospital
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Kamimura K
Department Of Physics Toho University
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Abe Katsuya
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Yamakami Tomohiko
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Nagasaka Yohei
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Yamakami T
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Hayashibe R
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Kida Takahiro
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Kamimura Kiichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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Sakurai Takuya
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
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